PECVD system MFLPECVD408-12
This PECVD system consists of a vacuum tube furnace, quartz vacuum chamber, RF power supply, gas supply system, extraction system, and vacuum measurement system.This device can be used for growing nanowires or preparing various thin films using CVD method.
Product features
1. Convert the gas in the quartz vacuum chamber into an ionic state through an RF power supply.
2. PECVD requires lower temperature for chemical vapor deposition than ordinary CVD
3. The stress magnitude of the deposited thin film can be controlled by the frequency of the RF power supply
4. PECVD has a higher chemical vapor deposition rate, better uniformity, consistency, and stability than ordinary CVD.
5. Widely used in the growth of various thin films, such as SiOx, SiNx, SiOxNy, and amorphous silicon (a-Si: H).
Technical requirements and parameters
1. Tube furnace parameters:
|
performance |
temperature range | Room temperature -1200 ℃ |
| working temperature | ≤ 1100 ℃ | |
| Heating zone | Length: 400mm | |
| Quartz tube | 80mm diameter, 1400mm length (pipe diameter optional 50, 60, 100) | |
| control accuracy | ＜ 1000 ± 0.1 ℃; ≥ 1000 ± 1 ℃ | |
| Temperature measuring element | K-type thermocouple | |
| Temperature control mode | Fuzzy PID control and self-tuning adjustment, intelligent 30 segment programmable control, with super mild and even breaking alarm function | |
| heating rate | The fastest heating rate is ≤ 30 ℃/min, and it is recommended that temperatures below 1000 degrees Celsius be ≤ 10 ℃/min | |
| Cooling rate | Above 700 ℃ ≤ 10 ℃/min | |
| Furnace surface temperature | The surface temperature of the furnace body is less than room temperature+10 (measurement point is 1000 ℃) | |
| Voltage power | 220V 3KW |
2. Gas supply system
 |
Air passage | 4-way |
| Gas flow control | Proton flow controller (seven star flow meter) | |
| control accuracy | ± 1.5% F.S | |
| Repetitive accuracy | ± 0.2% F.S | |
| Flow range | 1-500 SCCM | |
| Mechanical pressure gauge | A mechanical pressure gauge is installed on the panel and connected to the air mixing tank. Range: -0.1~0.15 Mpa |
3. Vacuum system
| vacuum system | source | 220V | |
| size | 650X650X600 | ||
| corrugated pipe | KF25X1000mm | ||
| The vacuum degree of the furnace tube can be reached using this system | 10-1Pa | ||
| Vacuum baffle valve | KF25 | ||
VRD-8 vacuum pump |
model | VRD-8 | |
| Ultimate partial pressure | 5X10-1 Pa | ||
| Air intake and exhaust interface | KF25 | ||
| motor speed | 1440RPM | ||
| Extraction rate | 2.2L/s | ||
| Motor power | 0.4KW | ||
Optional (mechanical pump+molecular pump unit) |
model | GZK-16-600 | |
| source | AC100-240 50/60HZ | ||
| power | 1KW | ||
| weight | 25KG | ||
| Maximum helium leakage rate | 5-10-8 Pa m3/s | ||
| Extraction rate | N2–33 L/s, He –39 L/s, H2–32 L/s | ||
| Ultimate pressure | 1.0 * 10-4Pa | ||
| Inlet and exhaust interfaces | KF40 | ||
Resistance vacuum gauge |
Model | ZDR-1 | |
| Power | 25W | ||
| Vacuum measurement range | 0.1-10 5 Pa | ||
| Resistive silicon | ZJ-52T | ||
source(Plasma generator) |
Power output range | 0-500W ★ | |
| Maximum reflected power | 200W | ||
| working frequency | RF: 13.56MHz ± 0.005% | ||
| Power stability | +/-0.1% | ||
| Harmonic component | ≤ -50dbc | ||
| RF area width | 0-600mm adjustable | ||
| Matching method | Automatic | ||
| Cooling method | Cold separation | ||
| Noise | <50dB | ||
| RF interface | 50 Ω N-type | ||
| Input power supply | 208-240V 50/60HZ | ||
3、 Usage environment and supporting requirements
| Site space (approximately) | Length x width x height=1800 x 800 x 1200 mm |
| Floor load-bearing capacity | The ground of the equipment usage site should be able to withstand a gravity of 150kg/m2 |
| power supply | 4KW distribution: 220V 50Hz |
| Operating temperature | Temperature: 0-40 ℃; |
| Usage environment | The ground should be clean and flat, without vibration or obvious air convection; |
4、 Shipping List
| name | quantity | ||
| Factory List | Tube furnace | One unit | |
| vacuum system | a set | ||
| 4-way hybrid system | a set | ||
| RF power supply | a set | ||
| Caston high-temperature gloves | a pair | ||
| Furnace hook | A handful | ||
| Insulation pipe blockage | Two | ||
| trachea | One root | ||
| Equipment manual | One copy | ||
| Instrument manual | One copy | ||
| Warranty Card | One copy |
5、 After sales service and precautions
1.Quality assurance: one-year warranty, lifetime technical support. (Special reminder, consumables such as heating elements, sample crucibles, etc. are not covered by the warranty. Damage caused by the use of corrosive gases is not covered by the warranty.)
2. H2 is a flammable and explosive gas, with a combustion temperature of 400 ℃.When mixed with air in a ratio of 4.0% -74.2%, it will explode. Therefore, safety measures should be taken when using hydrogen..
3. To improve the service life of the furnace, it is recommended that the heating rate should not exceed 10 ℃/min. The cooling rate shall not exceed 5 ℃/min.
4. This furnace cannot be filled with toxic or corrosive gases, otherwise it will damage the furnace and heating elements